Kohei Yata

→ Search for Kohei Yata in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11a-PB2-1~10] 13.3 Insulator technology

9:30 AM - 11:30 AM

[11a-PB2-2] Study of V_o diffusion barrier in SiO₂ with lattice constant modulation

〇(M1)Kohei Yata¹, Hiroyuki Kageshima¹ (1.Shimane Univ.)