Susumu Horita

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PB2 (PB)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11a-PB2-1~10] 13.3 Insulator technology

9:30 AM - 11:30 AM

[11a-PB2-4] Dependence of Residual OH Reduction in a Deposited Si Oxide Film on Low-Temperature Annealing Condition with NH₃ gas

〇Susumu Horita¹ (1.JAIST)