RengieMark Domincel Mailig

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 11:45 AM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:30 AM - 11:45 AM

▲ [11a-W934-11] The Schottky barrier height modulation of Pd₂Si/p-Si(100) diodes by dopant segregation process

〇RengieMark Domincel Mailig¹, Min Gee Kim¹, Shun-ichiro Ohmi¹ (1.Tokyo Institute of Technology)