Hitomi Watanabe

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 11:45 AM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 9:45 AM

△ [11a-W934-3] Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability

〇Hitomi Watanabe¹, Takuma Suzuki¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Daisuke Yamane¹, Toshifumi Konishi², Katsuyuki Machida¹, Hiroyuki Ito¹, Kazuya Masu¹, Masato Sone¹ (1.Tokyo Tech, 2.NTT AT Corp.)

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