Yoshimori Suzuki

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:00 AM - 11:45 AM W934 (W934)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:45 AM - 11:00 AM

[11a-W934-8] Profile Control of Phosphorus Ion by Sn Co-implantation in Germanium

Ryota Wada¹, 〇Yoshimori Suzuki¹, Tsutomu Nagayama¹, Takashi Kuroi¹, Tadashi Ikejiri¹, Hideaki Tanimura², Takayuki Aoyama², Shinichi Kato² (1.NISSIN ION EQUIPMENT CO.,LTD., 2.SCREEN Semiconductor Solutions Co., LTD.)

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