Ryotaro Kiga

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:15 PM - 5:15 PM M136 (H136)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11p-M136-1~14] 13.3 Insulator technology

2:15 PM - 2:30 PM

[11p-M136-5] Atom-Probe Observation of Oxidation-Enhanced Self-Diffusion in Isotopically Modulated Silicon Nanopillars

〇Ryotaro Kiga¹, Sayaka Hayashi¹, Satoru Miyamoto¹, Yasuo Shimizu², Yasuyoshi Nagai², Tetsuo Endoh^3,4, Kohei Itoh¹ (1.Keio Univ., 2.IMR Tohoku Univ., 3.CIES Tohoku Univ., 4.JST-ACCEL)

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