Kodai Shuto

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:15 PM - 5:15 PM M136 (H136)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[11p-M136-1~14] 13.3 Insulator technology

3:00 PM - 3:15 PM

△ [11p-M136-7] Flash Lamp Annealing temperature dependency on interface trap density of high-k gate stack

〇Kodai Shuto¹, Taiho Yoshinaka¹, Kodai Fujiwara¹, Hikaru Kawarazaki², Takayuki Aoyama², Shinichi Kato², Yasuo Nara¹ (1.Univ. of Hyogo, 2.SCREEN Semiconductor Solutions Co)

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