Michihito Shimauchi

→ Search for Michihito Shimauchi in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:30 PM - 3:30 PM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[11p-PB3-1~27] 13.7 Compound and power electron devices and process technology

1:30 PM - 3:30 PM

[11p-PB3-4] Study on Microfabrication of GaN by Photo-Electrochemical Etching

〇Michihito Shimauchi^1,2, Kazuki Miwa¹, Masachika Toguchi¹, Taketomo Sato¹, Junichi Motohisa^1,2 (1.RCIQE,Hokkaido Univ., 2.IST,Hokkaido Univ)