[11p-PB3-1~27] 13.7 Compound and power electron devices and process technology

[11p-PB3-4] Study on Microfabrication of GaN by Photo-Electrochemical Etching

〇Michihito Shimauchi^1,2, Kazuki Miwa¹, Masachika Toguchi¹, Taketomo Sato¹, Junichi Motohisa^1,2 (1.RCIQE,Hokkaido Univ., 2.IST,Hokkaido Univ)

Keywords:Gallium Nitride, Photo-Electrochemical Etching