Shinji Yamada

→ Search for Shinji Yamada in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:30 PM - 3:30 PM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[11p-PB3-1~27] 13.7 Compound and power electron devices and process technology

1:30 PM - 3:30 PM

[11p-PB3-6] Control of plasma-induced damage of n-type GaN treated by slope-down-bias ICP-RIE

〇Shinji Yamada^1,2,3, Hideki Sakurai^1,2,3, Masato Omori¹, Toshiyuki Nakamura³, Ryuichiro Kamimura³, Jun Suda^1,2, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.Nagoya Univ., 3.ULVAC ISET)

▲