Mayuko Sato

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:45 PM - 6:45 PM S011 (South Lecture Bldg.)

Oral presentation
| 21 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[11p-S011-1~18] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

1:45 PM - 2:00 PM

△ [11p-S011-1] Comparison between GaCl-O₂-N₂ and GaCl₃-O₂-N₂ systems in ε-Ga₂O₃Vapor Phase Epitaxy

〇Mayuko Sato¹, Nao Takekawa¹, Hisashi Murakami¹, Yoshinao Kumagai¹ (1.Tokyo University of Agriculture and Technology)