Naoto Kameda

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:45 PM - 5:15 PM S222 (S222)

Oral presentation
| 12 Organic Molecules and Bioelectronics
| 12.4 Organic light-emitting devices and organic transistors

[11p-S222-1~13] 12.4 Organic light-emitting devices and organic transistors

3:30 PM - 3:45 PM

[11p-S222-7] Al₂O₃ barrier film growth at room temperature by ALD with active species from high purity ozone gas

〇Naoto Kameda¹, Toshinori Miura¹, Yoshiki Morikawa¹, Mitsuru Kekura¹, Ken Nakamura², Hidehiko Nonaka² (1.Meidensha corp., 2.AIST)