Tatsuya Shirato

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:30 PM - 7:00 PM W541 (W541)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[11p-W541-1~20] 15.4 III-V-group nitride crystals

1:45 PM - 2:00 PM

[11p-W541-2] Sputtering and high-tempereture annealing of AlN on diamond substrate

〇Tatsuya Shirato¹, Yusuke Hayashi², Kenjiro Uesugi³, Kanako Shojiki⁴, Hideto Miyake^2,4 (1.Mie Univ. Sch. of Eng., 2.Mie Univ. Grad. Sch. of RIS, 3.Mie Univ. SPORR, 4.Mie Univ. Grad. Sch. of Eng.)

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