Kenji Miyashita

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:45 PM - 5:30 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

4:45 PM - 5:00 PM

△ [11p-W641-12] Corrosive behavior of Y-O-F system ceramics under CHF₃/O₂ plasma

〇Kenji Miyashita¹, Toru Tsunoura¹, Katsumi Yoshida¹, Toyohiko Yano¹ (1.Tokyo Tech)