Yuta Sugimoto

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:45 PM - 5:30 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

5:15 PM - 5:30 PM

[11p-W641-14] Effects of the Antenna Structure for Inductively Coupled Plasma to Etch Rate Uniformity

〇Yuta Sugimoto¹, Masashi Yamage¹, Yoshie Okamoto², Tomoaki Yoshimori², Hidetada Azumano² (1.TOSHIBA, 2.SHIBAURA MECHATRONICS)