9:30 AM - 11:30 AM
[12a-PA3-5] Growth of β-Ga2(O1-xSx)3 Alloy Films on YSZ Substrates by Mist Chemical Vapor Deposition
〇Tubasa Hiroe1, Moe Nagano1, Kazuaki Akaiwa1, Tomoki Abe1, Motohisa Kado2, Kunio Ichino1 (1.Tottori Univ., 2.Toyota Motor Corp.)