Kosuke Suzuki

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[12a-PB3-10] Micro-Bending Test of Gold Micro-Cantilevers and the effect of thickness

〇Kosuke Suzuki¹, Ken Hashigata¹, Keisuke Asano¹, Chun-Yi Chen¹, Takashi Nagoshi², Tso-Fu Mark Chang¹, Daisuke Yamane¹, Toshifumi Konishi^1,3, Katsuyuki Machida¹, Hiroyuki Ito¹, Kazuya Masu¹, Masato Sone¹ (1.Tokyo tech, 2.AIST, 3.NTT AT Corp)

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