Satoshi Maruyama

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

△ [12a-PB3-13] Displacement detection lower limit evaluation and label-free molecular detection of optical interferometric surface stress sensor

〇Satoshi Maruyama¹, Yong Joon Choi¹, Kazuhiro Takahashi^1,2, Kazuaki Sawada¹ (1.Toyohashi Tech., 2.JST PRESTO)