Shota Otobe

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[12a-PB3-1~16] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

△ [12a-PB3-9] A Study on SCD Electrodes for Au-Proof-Mass 3-axis MEMS Accelerometer

〇Shota Otobe¹, Ken Atsumi¹, Tatsuya Koga¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Masato Sone¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

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