Taishin Shimada

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:30 AM - 10:45 AM

△ [12a-W641-7] Investigation of uniform microwave plasma generation excited by slot antenna using electromagnetic field simulation

〇Taishin Shimada¹, Takeshi Aizawa¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹ (1.Kanazawa Univ.)