Susumu Maeda

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 1:30 PM - 5:00 PM M111 (H111)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[12p-M111-1~13] 15.7 Crystal characterization, impurities and crystal defects

2:30 PM - 2:45 PM

[12p-M111-5] Investigation for oxygen precipitation model in ultra-high temperature RTP wafers (3)

〇Susumu Maeda¹, Kozo Nakamura², Haruo Sudo¹, Koji Sueoka³ (1.Technology, GlobalWafers Japan Co., Ltd., 2.Regional Cooperative Research Org., Okayama Prefectural Univ., 3.Faculty of Computer Science and Systems Eng., Okayama Prefectural Univ.)

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