Haruo Sudo

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 1:30 PM - 5:00 PM M111 (H111)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[12p-M111-1~13] 15.7 Crystal characterization, impurities and crystal defects

2:45 PM - 3:00 PM

[12p-M111-6] Control of oxygen precipitation in Si wafers by ultra-high temperature RTP

〇Haruo Sudo^1,2, Susumu Maeda¹, Kozo Nakamura³, Koji Sueoka⁴ (1.GlobalWafers Japan, 2.Graduate School of Computer Science and Systems Eng., Okayama Pref. Univ., 3.Regional Cooperative Research Org., Okayama Pref. Univ., 4.Faculty of Computer Science and Systems Eng., Okayama Pref. Univ.)

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