Tomoaki Kageyama

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-M114-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:30 AM - 11:45 AM

[9a-M114-11] Considerations of ultrapure water quantity optimization for wafer cleaning

〇Tomoaki Kageyama^1,3, Kazumasa Nemoto², Sommawan Khumpuang^2,3, Shiro Hara^2,3, Sang-Seok Lee¹ (1.Tottori Univ., 2.MINIMAL, 3.AIST)