kazushige sato

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:00 AM - 12:00 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9a-M114-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:15 AM - 9:30 AM

[9a-M114-2] On Dislocation Control at the Time of Rapid Temperature Elevation in Minimal Laser Heating Furnace

〇kazushige sato^1,3, Takashi Chiba^1,3, Masao Terada^1,3, Shinichi Ikeda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MINIMAL, 2.AIST, 3.Sakaguchi E.H VOC Corp.)

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