Hidekazu Murata

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:30 AM - 12:00 PM S223 (S223)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[9a-S223-1~9] 7.2 Applications and technologies of electron beams

10:00 AM - 10:15 AM

[9a-S223-3] Aberration analysis for a cylindrical deflector analyzer

Seiji Watanabe¹, 〇Hidekazu Murata¹, Hirotaka Asai¹, Eiji Rokuta¹, Hiroshi Shimoyama¹ (1.Meijo Univ.)