Miyu Furuhashi

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:30 PM - 3:30 PM M113 (H113)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[9p-M113-1~8] 6.2 Carbon-based thin films

3:00 PM - 3:15 PM

[9p-M113-7] Influence of high-density plasma density on the structure of a - C: H film deposited by plasma CVD

〇(M1)Miyu Furuhashi¹, Kousaka Hiroyuki² (1.Gifu Univ.Grad.Sch., 2.Gifu Univ.)