[9p-M113-1~8] 6.2 Carbon-based thin films

[9p-M113-7] Influence of high-density plasma density on the structure of a - C: H film deposited by plasma CVD

〇(M1)Miyu Furuhashi¹, Kousaka Hiroyuki² (1.Gifu Univ.Grad.Sch., 2.Gifu Univ.)

Keywords:Diamond-like Carbon films, hydrogenated amorphous carbon films

Ultrahigh-speed DLC coating is achieved by high-density plasma generated by microwave power absorption at around ion sheath formed along substrate surface. However, the influence of the increased plasma density on the structure of the DLC film is not clarified.Therefore, in this study, Raman spectroscopy and nano indenter measurements of DLC films were carried out for the purpose of comparing the structure of DLC films prepared under conditions where the plasma density was greatly different. As a result, the film formation rate and film hardness increased by employing microwave assisted high- density plasma, while the hydrogen content in the film decreased.