Rikito Kanazawa

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:15 PM - 3:45 PM M114 (H114)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[9p-M114-1~10] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 1:45 PM

[9p-M114-2] SiC Nano-Dot Formation in Poly-Si and Amorphous-Si Substrates
using Hot C⁺ Ion Implantation (Ⅱ) : C⁺Dose Dependency

〇Rikito Kanazawa¹, Takashi Aoki¹, Toshiyuki Sameshima², Tomohisa Mizuno¹ (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)