Toshiyuki Horiuchi

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 5:00 PM S223 (S223)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[9p-S223-1~12] 7.3 Micro/Nano patterning and fabrication

1:45 PM - 2:00 PM

[9p-S223-1] Investigation on Optics for Printing Large Patterns Using Maskless Inside Lithography

〇Toshiyuki Horiuchi¹, Kousuke Akitani¹, Kazumi Imahashi¹, Yuta Suzuki¹, Jun-ya Iwasaki¹, Akira Yanagida¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)