Akira Sasaki

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 5:00 PM S223 (S223)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[9p-S223-1~12] 7.3 Micro/Nano patterning and fabrication

2:15 PM - 2:30 PM

[9p-S223-3] Modeling of exposure and development processes in EUV lithography

〇Akira Sasaki¹, Ishino Masahiko¹, Nishikino Masaharu¹, Maekawa Yasunari¹ (1.QST)