Hiroki Sunagawa

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 5:00 PM S223 (S223)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[9p-S223-1~12] 7.3 Micro/Nano patterning and fabrication

4:00 PM - 4:15 PM

[9p-S223-9] Study on 3-D profile correction for resist shrinkage in nanoimprint lithography

Kenta Watanabe¹, 〇Hiroki Sunagawa¹, Ryunosuke Yamashita², Masaaki Yasuda¹, Yuki Onishi², Hiroaki Kawata¹, Yoshihiko Hirai¹ (1.Osaka Pref.Univ, 2.Tokyo Tech.)

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