Makato Moriyama

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:30 PM - 6:00 PM W323 (W323)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[9p-W323-1~17] 8.1 Plasma production and diagnostics

4:00 PM - 4:15 PM

△ [9p-W323-10] Investigation of characteristics on dual-frequency CCP using COMSOL^®

〇(D)Makato Moriyama¹, Akihiro Mituya¹, Naoya Nakahara¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)