Masayuki Imaizumi(Mitsubishi Electric), Tohru Oka(Toyoda Gosei)
Masayuki Imaizumi
Chairperson, etc.
Sun. Mar 10, 2019 1:30 PM - 5:50 PM W922 (Multi-Purpose Digital Hall)
- Symposium (Oral)
- | Symposium
- | Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-