The 66th JSAP Spring Meeting, 2019

Kazunori Shinoda

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Chairperson, etc.

Mon. Mar 11, 2019 1:45 PM - 5:30 PM W641 (W641)

  • Oral presentation
  • | 8 Plasma Electronics
  • | 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11p-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Daisuke Ogawa(Chubu Univ.), Kazunori Shinoda(HITACHI)