[10a-M113-1~6] 6.2 Carbon-based thin films

△ [10a-M113-4] Fabrication of Conductive Wear Resistant Films with Periodical N-DLC/WC Multilayered Structure

〇Koki Tamekuni¹, Toru Harigai¹, Satoshi Degai¹, Tsuyoshi Tanimoto¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Shigeki Takago², Haruyuki Yasui², Satoru Kaneko³, Shinsuke Kunitugu⁴, Masao Kamiya⁵, Makoto Taki⁶ (1.Toyohashi Univ. Technol., 2.Ind. Res. Inst. Ishikawa, 3.Kanagawa Inst. Ind. Sci. Technol., 4.Ind. Technol. Cent. Okayama, 5.Itoh Opt. Ind. Co., Ltd., 6.Onward Ceram. Coat. Co., Ltd.)

Keywords:diamond-like carbon, periodical multilayered films

Conductive wear resistant coating is required as a surface protective film of contact pins used for product inspection of IC chips. In this study, nitrogen containing DLC (N-DLC) films and tungsten carbide (WC) films were periodically laminated for the purpose of protecting film with higher conductivity than N-DLC film. The wear resistance of the N-DLC/WC laminated film was improved compared to the N-DLC monolayer film. In addition, the electric resistivity of the N-DLC/WC laminated film was about half that of the N-DLC monolayer film.