[10a-M113-1~6] 6.2 Carbon-based thin films

△ [10a-M113-5] Si-Containing Diamond-Like Carbon Films Prepared by Filtered Pulse Arc Deposition

〇Yuya Sugie¹, Takafumi Toya¹, Tsuyoshi Tanimoto¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Shinsuke Kunitsugu³, Satoru Kaneko⁴, Makoto Taki⁵ (1.Toyohashi Univ. Technol., 2.Itoh Opt. Ind. Co., Ltd, 3.Ind. Technol. Cent. Okayama, 4.Kanagawa Inst. Ind. Sci. Technol., 5.Onward Ceram. Coat. Co., Ltd.)

Keywords:diamond-like carbon, Si-DLC

In this research, Si-containing DLC (Si-DLC) films were prepared by filtered pulse arc deposition method and its film characteristics were analyzed. Si free DLC and Si-DLC films were deposited on a WC substrate. Graphite as the cathode contains different Si content (0, 2, 5, 10 at.%). As a result of XPS analysis, Si content in the film tended to be higher than the cathode. Raman spectra of all films showed hybrid peaks consisting of D peak and G peak.