The 66th JSAP Spring Meeting, 2019

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13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)

Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.)

9:00 AM - 9:15 AM

△ [10a-M114-1] TFT operation of solid-phase crystallized Ge thin film with high hole mobility

〇Toshifumi Imajo1, Kenta Moto1, Keisuke Yamamoto2, Takashi Suemasu1, Hiroshi Nakashima3, Kaoru Toko1 (1.Univ. of Tsukuba, 2.IGSES, Kyushu Univ., 3.GIC, Kyushu Univ.)

Keywords:TFT, Ge