11:15 AM - 11:30 AM
[10a-M114-9] Temperature Distribution Analysis in Molten Silicon during Atmospheric Pressure Thermal Plasma Jet Irradiation
Keywords:Atmospheric Pressure Thermal Plasma Jet, Non-contact Temperature Measurement
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Sun. Mar 10, 2019 9:00 AM - 12:00 PM M114 (H114)
Takashi Noguchi(Univ. of the Ryukyus), Seiichiro Higashi(Hiroshima Univ.)