The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[10a-S011-1~8] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Sun. Mar 10, 2019 9:00 AM - 11:15 AM S011 (South Lecture Bldg.)

Tomoki Abe(Tottori Univ.)

10:15 AM - 10:30 AM

[10a-S011-5] Challenge of n-type and p-type ZnO thin films fabrication by Mist CVD

Misaki Nishi1, Li Liu1, Phimolphan Rutthongjan1, Shota Sato1, Mariko Ueda1, Tatuya Yasuoka1, Ryo Hasegawa1, Yuki Tagashira1, Tamako Ozaki1, Giang T. Dang1, Toshiyuki Kawaharamura1 (1.Kochi Univ. Tech.)

Keywords:Mist CVD