[10a-S221-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

△ [10a-S221-7] Scalable silicon qubits with stacked structures by CMOS Technology

〇(M2)Yuki Ito¹, Masaharu Kobayashi¹, Toshiro Hiramoto¹ (1.IIS, Univ. of Tokyo)

Keywords:qubit, quantum computing, silicon

We propose scalable silicon qubits arrangement architecture with vertically stacked structures. The readout of spin quantum states of the multiple qubits is successfully demonstrated by the simulation and therefore the feasibility of the vertically stacked arrangement architecture is confirmed.