Fabrication of InAlN films by reactive sputtering with glancing-angle deposition scheme

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 Plasma nanotechnology

Sun. Mar 10, 2019 9:00 AM - 10:45 AM W241 (W241)

Yasunori Tanaka(Kanazawa Univ.)

10:15 AM - 10:30 AM

〇Yoshiyuki Nakayama¹, Masashi Hosoya¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst of Tech., 2.Kanto Gakuin Univ.)

Keywords:Electrochromic, Bangap control, Optical properties