9:15 AM - 9:30 AM
[10a-W323-2] Study on growth temperatures and relaxation of lattice strain in the epitaxial Pt/SrTiO3(111) films
Keywords:metal thin films, epitaxial, sputtering, SrTiO3
We fabricated Pt epitaxial films on SrTiO3(111) by a dc-sputtering method. Surface structure, atomic-scale surface morphology and electrochemical properties are discussed. RHEED observation indicates that epitaxial films are obtained at substrate temperatures of 450, 500 and 550 °C. The RHEED patterns in the zero and first order Laue zone indicates high crystallinity and the atomically smooth surface of the films. Oscillation in the intensity of X-ray diffraction is also observed neighboring the Pt-111 peak, that shows uniform atomic stacking along the out-of-plane direction. Analysis using dynamic scattering theory reveals that there is a compressive in-plane lattice strain. Laue fringes disappears as the growth temperature is raised more than 600 °C.