[10a-W351-1~6] 9.4 Thermoelectric conversion

[10a-W351-2] Thermoelectric properties of Au and B co-doped Si-Ge thin films

〇Kotaro Hirose¹, Masahiro Adachi¹, Shunsuke Nishino¹, Yoshiyuki Yamamoto¹, Tsunehiro Takeuchi² (1.Sumitomo Elec. Ind., 2.Toyota Tech. Inst.)

Keywords:SiGe, Semiconductor, ZT

Power generation technology based on thermoelectric materials is expected as application of waste heat power generation. High performance thermoelectric materials is studied. Both increasing power factor and decreasing thermal conductivity is important to improve ZT. We demonstrate that Au and B co-doping improve ZT of SiGe.