[10a-W611-1~9] 16.3 Bulk, thin-film and other silicon-based solar cells

[10a-W611-1] Tuning electrical properties of ALD-TiO_x electron-selective contact by stacking layers

Takeya Mochizuki¹, 〇Kazuhiro Gotoh¹, Yasuyoshi Kuokawa¹, Noritaka Usami¹ (1.Graduate School of Eng, Nagoya Univ.)

Keywords:titanium oxide, passivation, atomic layer deposition