9:15 AM - 9:30 AM
▲ [10a-W934-2] Oxidation-induced shrink of Si-Si bond
Keywords:Vertical MOSFET, Si nanoplillar, Oxidation
Presentation information
Oral presentation
13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
[10a-W934-1~11] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials
Sun. Mar 10, 2019 9:00 AM - 12:00 PM W934 (W934)
Koichiro Saga(Sony), Takashi Hasunuma(Univ. of Tsukuba)