The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.1 X-ray technologies

[10p-M112-1~7] 7.1 X-ray technologies

Sun. Mar 10, 2019 1:15 PM - 3:00 PM M112 (H112)

Mitsunori Toyoda(Tokyo Polytechnic Univ.), Norio Watanabe(Univ. of Tsukuba)

2:00 PM - 2:15 PM

[10p-M112-4] Soft X-ray high-diffraction-efficiency W/C multilayer laminar-type diffraction gratings design for 200-900 eV range

Masato Koike1, Tadashi Hatano2, Alexander Pirozhkov1, Masami Terauchi2, Nobukazu Hayashi3, Hiroyuki Sasai3, Tetsuya Nagano3 (1.QuBS, National Inst.for Quantum and Radiological Sci. and Tech., 2.IMRM, Tohoku Univ., 3.Device Dept., Shimadzu Corp.)

Keywords:soft X-ray, diffraction grating, multilayer

Recently, there has been growing interest in photoluminescence analysis near the Fe - L (705 eV) of steel. For this reason, a method for improving the diffraction efficiency by adding an X-ray multilayer film on the ordinary diffraction grating having a metal surface was considered. We calculated the diffraction efficiency of a multilayer laminar-type diffraction grating in which a few pairs of C and W having film thickness of 7 and 6 nm,respectively, in order on Au grating grooves. It has been found that the diffraction efficiency of 0.03 or more was demonstrated in a wide energy range of approximately 200 eV to 900 eV.