[10p-PA6-1~6] 7 Beam Technology and Nanofabrication (Poster)

[10p-PA6-1] Wavelet trjectory and classical orbit of an electron in the Coulomb scattering for low energy with low impact parameter

〇Yoshio Nishiyama¹, Fumiaki Tajima¹ (1.Yokohama Nat'l U.)

Keywords:wavelet trajectory, Coulomb scattering, SEM image of low acceleration voltage

By applying the relation between the wave trajectory and the ray of optics to the motion of the electron in the Coulomb scattering we find the limit of the scattering angle depending on the electron energy. The limit angle approaches π of classica mechanics as the energy gets lower. This will contribute to a new analysis of SEM image of low acceleration voltage.