The 66th JSAP Spring Meeting, 2019

Presentation information

Poster presentation

17 Nanocarbon Technology » 17 Nanocarbon Technology (Poster)

[10p-PB5-1~55] 17 Nanocarbon Technology (Poster)

Sun. Mar 10, 2019 4:00 PM - 6:00 PM PB5 (PB)

4:00 PM - 6:00 PM

[10p-PB5-28] Pressure dependence of CNM fabrication for LSI interconnect using supercritical ethanol

Hiroto Hagiwara1, Hikaru Sato1, Masatoshi Ito1, Yoshio Uhara1, Shigeru Saito1 (1.Tokyo University of Science)

Keywords:Carbon nano materials

In the supercritical fluid deposition method, the supply of high concentration of carbon to fine pores is possible from the low viscosity and high diffusivity of the supercritical fluid, so that it can be expected to supply materials several hundred times as compared with the method. In this time, we tried to make and embed into micro pores using ethanol as a carbon source. The effect of pressure on pressure is reported.