[10p-PB5-1~55] 17 Nanocarbon Technology (Poster)

[10p-PB5-28] Pressure dependence of CNM fabrication for LSI interconnect using supercritical ethanol

〇Hiroto Hagiwara¹, Hikaru Sato¹, Masatoshi Ito¹, Yoshio Uhara¹, Shigeru Saito¹ (1.Tokyo University of Science)

Keywords:Carbon nano materials

In the supercritical fluid deposition method, the supply of high concentration of carbon to fine pores is possible from the low viscosity and high diffusivity of the supercritical fluid, so that it can be expected to supply materials several hundred times as compared with the method. In this time, we tried to make and embed into micro pores using ethanol as a carbon source. The effect of pressure on pressure is reported.