[10p-PB5-1~55] 17 Nanocarbon Technology (Poster)

[10p-PB5-31] Pressure and substrate temperature dependence of fabrication of CNM in nanohole
using supercritical carbon dioxide for LSI wiring

〇Hiromi Terachi¹, Tatsuya Yamazaki¹, Masatoshi Itoh¹, Yoshio Uhara¹, Shigeru Saito¹ (1.Tokyo Univ of Science)

Keywords:supercritical carbon dioxide